LIS3L02AQ3-LIS3L02AQ3TR Fast Delivery |IC PHOENIX CO.,LIMITED

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LIS3L02AQ3-LIS3L02AQ3TR
MEMS INERTIAL SENSOR: 3-Axis
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LIS3L02AQ3
May 2005 Features 2.4V TO 3.6V SINGLE SUPPLY OPERATION LOW POWER CONSUMPTION ±2g/±6g USER SELECTABLE FULL-SCALE BETTER THAN 0.5mg RESOLUTION OVER
100Hz BANDWIDTH EMBEDDED SELF TEST AND POWER DOWN OUTPUT VOLTAGE, OFFSET AND
SENSITIVITY RATIOMETRIC TO THE
SUPPLY VOLTAGE HIGH SHOCK SURVIVABILITY ECO-PACK COMPLIANT Description
The LIS3L02AQ3 is a low-power 3-Axis linear capac-
itive accelerometer that includes a sensing element
and an IC interface able to take the information from
the sensing element and to provide an analog signal
to the external world.
The sensing element, capable of detecting the accel-
eration, is manufactured using a dedicated process
developed by ST to produce inertial sensors and ac-
tuators in silicon.
The IC interface is manufactured using a standard
CMOS process that allows high level of integration to
design a dedicated circuit which is trimmed to better
match the sensing element characteristics.
The LIS3L02AQ3 has a user selectable full scale of
±2g, ±6g and it is capable of measuring accelerations
over a bandwidth of 1.5 KHz for all axes. The device
bandwidth may be reduced by using external capac-
itances. A self-test capability allows to check the me-
chanical and electrical signal path of the sensor.
The LIS3L02AQ3 is available in plastic SMD pack-
age and it is specified over an extended temperature
range of -40°C to +85°C.
The LIS3L02AQ3 belongs to a family of products
suitable for a variety of applications: Mobile terminals Gaming and Virtual Reality input devices Free-fall detection for data protection Antitheft systems and Inertial Navigation Appliance and Robotics
MEMS INERTIAL SENSOR:
3-Axis - ±2g/±6g LINEAR ACCELEROMETER
Figure 2. Block Diagram
Table 1. Order Codes
Rev. 2
LIS3L02AQ3
Table 2. Pin Description
Figure 3. Pin Connection (Top view)
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LIS3L02AQ3
Notes:1. The product is factory calibrated at 3.3V. The device can be powered from 2.4V to 3.6V. Voff, So and Vt parameters will vary with
supply voltage. Typical specifications are not guaranteed Guaranteed by wafer level test and measurement of initial offset and sensitivity Zero-g level and sensitivity are essentially ratiometric to supply voltage Guaranteed by design Contribution to the measuring output of the inclination/acceleration along any perpendicular axis Self test “output voltage change” is defined as Vout(Vst=Logic1)-Vout(Vst=Logic0) Self test “output voltage change” varies cubically with supply voltage When full-scale is set to ±6g, self-test “output voltage change” is one third of the specified value
10.Minimum resonance frequency Fres=1.5KHz. Sensor bandwidth=1/(2*π*110KΩ*Cload) with Cload>1nF.
Table 3. Mechanical Characteristics1
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V, T=25°C unless oth-
erwise noted
LIS3L02AQ3
Notes:1. The product is factory calibrated at 3.3V. Typical specifications are not guaranteed Minimum resonance frequency Fres=1.5KHz. Sensor bandwidth=1/(2*π*110KΩ*Cload) with Cload>1nF Absolute Maximum Rating
Stresses above those listed as “absolute maximum ratings” may cause permanent damage to the device. This
is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to
maximum rating conditions for extended periods may affect device reliability.
Table 5. Absolute Maximum Rating
This is a ESD sensitive device, improper handling can cause permanent damages to the part.
This is a mechanical shock sensitive device, improper handling can cause permanent damages to the
part.
Table 4. Electrical Characteristics1
(Temperature range -40°C to +85°C) All the parameters are specified @ Vdd =3.3V, T=25°C unless
otherwise noted
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LIS3L02AQ3
3.1 Terminology
Sensitivity describes the gain of the sensor and can be determined by applying 1g acceleration to it. As
the sensor can measure DC accelerations this can be done easily by pointing the axis of interest towards
the center of the earth, note the output value, rotate the sensor by 180 degrees (point to the sky) and note
the output value again thus applying ±1g acceleration to the sensor. Subtracting the larger output value
from the smaller one and dividing the result by 2 will give the actual sensitivity of the sensor. This value
changes very little over temperature (see sensitivity change vs. temperature) and also very little over time.
The Sensitivity Tolerance describes the range of Sensitivities of a large population of sensors.
Zero-g level describes the actual output signal if there is no acceleration present. A sensor in a steady
state on a horizontal surface will measure 0g in X axis and 0g in Y axis whereas the Z axis will measure
+1g. The output is ideally for a 3.3V powered sensor Vdd/2 = 1650mV. A deviation from ideal 0-g level
(1650mV in this case) is called Zero-g offset. Offset of precise MEMS sensors is to some extend a result
of stress to the sensor and therefore the offset can slightly change after mounting the sensor onto a printed
circuit board or exposing it to extensive mechanical stress. Offset changes little over temperature - see
"Zero-g level change vs. temperature" - the Zero-g level of an individual sensor is very stable over lifetime.
The Zero-g level tolerance describes the range of zero-g levels of a population of sensors.
Self Test allows to test the mechanical and electrical part of the sensor. By applying a digital signal to the
ST input pin an internal reference is switched to a certain area of the sensor and creates a defined deflec-
tion of the moveable structure. The sensor will generate a defined signal and the interface chip will perform
the signal conditioning. If the output signal changes with the specified amplitude than the sensor is working
properly and the parameters of the interface chip are within the defined specifications.
Output impedance describes the resistor inside the output stage of each channel. This resistor is part of
a filter consisting of an external capacitor of at least 320pF and the internal resistor. Due to the high resis-
tor level only small, inexpensive external capacitors are needed to generate low corner frequencies. When
interfacing with an ADC it is important to use high input impedance input circuitries to avoid measurement
errors. Note that the minimum load capacitance forms a corner frequency beyond the resonance frequen-
cy of the sensor. For a flat frequency response a corner frequency well below the resonance frequency is
recommended. In general the smallest possible bandwidth for an particular application should be chosen
to get the best results. Functionality
The LIS3L02AQ3 is a high performance, low-power, analog output 3-Axis linear accelerometer packaged in a
QFN package. The complete device includes a sensing element and an IC interface able to take the information
from the sensing element and to provide an analog signal to the external world.
4.1 Sensing element
A proprietary process is used to create a surface micro-machined accelerometer. The technology allows to carry
out suspended silicon structures which are attached to the substrate in a few points called anchors and are free
to move in the direction of the sensed acceleration. To be compatible with the traditional packaging techniques
a cap is placed on top of the sensing element to avoid blocking the moving parts during the moulding phase of
the plastic encapsulation.
When an acceleration is applied to the sensor the proof mass displaces from its nominal position, causing an
imbalance in the capacitive half-bridge. This imbalance is measured using charge integration in response to a
voltage pulse applied to the sense capacitor.
At steady state the nominal value of the capacitors are few pF and when an acceleration is applied the maximum
variation of the capacitive load is up to 100fF.
4.2 IC Interface
In order to increase robustness and immunity against external disturbances the complete signal processing
chain uses a fully differential structure. The final stage converts the differential signal into a single-ended one to
LIS3L02AQ3
be compatible with the external world.
The signals of the sensing element are multiplexed and fed into a low-noise capacitive charge amplifier that im-
plements a Correlated Double Sampling system (CDS) at its output to cancel the offset and the 1/f noise. The
output signal is de-multiplexed and transferred to three different S&Hs, one for each channel and made avail-
able to the outside.
The low noise input amplifier operates at 200 kHz while the three S&Hs operate at a sampling frequency of 66
kHz. This allows a large oversampling ratio, which leads to in-band noise reduction and to an accurate output
waveform.
All the analog parameters (zero-g level, sensitivity and self-test) are ratiometric to the supply voltage. Increasing
or decreasing the supply voltage, the sensitivity and the offset will increase or decrease almost linearly. The self
test voltage change varies cubically with the supply voltage
4.3 Factory calibration
The IC interface is factory calibrated for sensitivity (So) and Zero-g level (Voff).
The trimming values are stored inside the device by a non volatile structure. Any time the device is turned on,
the trimming parameters are downloaded into the registers to be employed during the normal operation. This
allows the user to employ the device without further calibration. Application Hints
Figure 4. LIS3L02AQ3 Electrical Connection
Power supply decoupling capacitors (100nF ceramic or polyester + 10µF Aluminum) should be placed as near
as possible to the device (common design practice).
The LIS3L02AQ3 allows to band limit Voutx, Vouty and Voutz through the use of external capacitors. The re-
commended frequency range spans from DC up to 1.5 KHz. In particular, capacitors must be added at output
pins to implement low-pass filtering for antialiasing and noise reduction. The equation for the cut-off frequency
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LIS3L02AQ3
(ft) of the external filters is:
Taking in account that the internal filtering resistor (Rout) has a nominal value equal to 110kΩ, the equation for
the external filter cut-off frequency may be simplified as follows:
The tolerance of the internal resistor can vary typically of ±20% within its nominal value of 110kΩ; thus the cut-
off frequency will vary accordingly. A minimum capacitance of 320 pF for Cf(x,y,z) is required in any case.
Table 6. Filter Capacitor Selection, Cf (x,y,z). Commercial capacitance value choose.
5.1 Soldering information
The QFN44 package is lead free and green package qualified for soldering heat resistance according to JEDEC
J-STD-020D. Land pattern and soldering recommendations are available upon request.t 1 Rout C load xyz,,()⋅⋅---------------------------------- --------------- --------------=t 1.45µF load xyz,,()-- ---------------------------------=

Partno	Mfg	Dc	Qty	Available	Descript
LIS3L02AQ3	ST	N/a	43	avai	MEMS INERTIAL SENSOR: 3-Axis
LIS3L02AQ3TR	STM	N/a	27600	avai	MEMS INERTIAL SENSOR: 3-Axis