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LIS3L02AQSTMN/a10000avaiINERTIAL SENSOR: 3AXIS


LIS3L02AQ ,INERTIAL SENSOR: 3AXISLIS3L02AQINERTIAL SENSOR:3Axis - 2g/6g LINEAR ACCELEROMETERPRODUCT PREVIEW■ 3V TO 5.25V SINGLE SUPP ..
LIS3L02AQ3 ,MEMS INERTIAL SENSOR: 3-AxisFeatures■ 2.4V TO 3.6V SINGLE SUPPLY OPERATION■ LOW POWER CONSUMPTION■ ±2g/±6g USER SELECTABLE FULL ..
LIS3L02AQ3TR ,MEMS INERTIAL SENSOR: 3-AxisBlock DiagramRoutxX+ VoutxCHARGE S/HY+AMPLIFIERZ+Routya VoutyMUX DEMUXS/HZ-Y-RoutzX-VoutzS/HREFEREN ..
LIS3LV02DL ,Linear Accelerometer 3-Axis ?g/ ?g with SPI/I2C digital interfaceAbsolute maximum ratings . . . . 172.5 Terminology . . . . . . . 182.5.1 Sensitivity ..
LIS3LV02DL-TR ,Linear Accelerometer 3-Axis ?g/ ?g with SPI/I2C digital interfaceFeatures■ 2.16 V to 3.6 V single supply operation■ 1.8 V compatible IOs2■ I C/SPI digital output in ..
LK112M15TR ,LOW NOISE LOW DROP VOLTAGE REGULATOR WITH SHUTDOWN FUNCTIONLK112SERIESLOW NOISE LOW DROP VOLTAGE REGULATORWITH SHUTDOWN FUNCTION ■ OUTPUT CURRENT UP TO 150mA ..
LM324AD ,QUAD DIFFERENTIAL INPUT OPERATIONAL AMPLIFIERSstandard operational amplifier types in single supply applications. Thequad amplifier can operate a ..
LM324ADB , QUADRUPLE OPERATIONAL AMPLIFIERS
LM324ADBR ,Quad General Purpose Operational AmplifierMaximum Ratings.. 410 Power Supply Recommendations... 136.2 ESD Ratings ...... 411 Layout.... 136.3 ..
LM324ADR ,Quad General Purpose Operational AmplifierElectrical Characteristics for LMx24A andLM324KA.... 6 12.2 Related Links.. 156.8 Operating Conditi ..
LM324ADR2 ,Single Supply Quad Operational Amplifierstandard operational amplifier types in single supply applications. Thequad amplifier can operate a ..
LM324ADRG4 ,Quadruple Operational Amplifier 14-SOIC 0 to 70Maximum Ratings.. 410 Power Supply Recommendations... 136.2 ESD Ratings ...... 411 Layout.... 136.3 ..


LIS3L02AQ
INERTIAL SENSOR: 3AXIS
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LIS3L02AQ

February 2003 3V TO 5.25V SINGLE SUPPLY OPERATION THE SENSITIVITY IS ADJUSTED WITH A
TOTAL ACCURACY OF ±10% THE OUTPUT VOLTAGE, OFFSET,
SENSITIVITY AND TEST VOLTAGE ARE
RATIOMETRIC TO THE SUPPLY VOLTAGE DEVICE SENSITIVITY IS ON-CHIP FACTORY
TRIMMED EMBEDDED SELF TEST HIGH SHOCK SURVIVABILITY
DESCRIPTION

The LIS3L02AQ is a three-axis linear accelerome-
ter that includes a sensing element and an IC in-
terface able to take the information from the
sensing element and to provide an analog signal
to the external world.
The sensing element, capable to detect the accel-
eration, is manufactured using a dedicated pro-
cess called THELMA (Thick Epi-Poly Layer for
Microactuators and Accelerometers) developed
by ST to produce inertial sensors and actuators in
silicon.
The IC interface instead is manufactured using a
CMOS process that allows high level of integration
to design a dedicated circuit which is trimmed to
better match the sensing element characteristics.
The LIS3L02AQ has a user selectable full scale of
2g, 6g and it is capable of measuring accelerations
over a maximum bandwidth of 4.0 KHz for the X
and Y axis and 2.5KHz for the Z axis. The device
bandwidth may be reduced by using external ca-
pacitances. A self-test capability allows the user to
check the functioning of the system.
The LIS3L02AQ is available in plastic SMD pack-
age and it is specified over a temperature range
extending from -40°C to +85°C.
The LIS3L02AQ belongs to a family of products
suitable for a variety of applications: Antitheft systems Inertial navigation Virtual reality input devices Vibration Monitoring, recording and compen-
sation Appliance control Robotics
PRODUCT PREVIEW

INERTIAL SENSOR:
3Axis - 2g/6g LINEAR ACCELEROMETER
BLOCK DIAGRAM
LIS3L02AQ
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PIN DESCRIPTION
PIN CONNECTION (Top view)
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LIS3L02AQ
ELECTRICAL CHARACTERISTCSS(Temperature range -40°C to +85°C) FUNCTIONALITY
1.1 Sensing element

The THELMA process is utilized to create a surface micro-machined accelerometer. The technology al-
lows to carry out suspended silicon structures which are attached to the substrate in a few points called
anchors and free to move on a plane parallel to the substrate itself. To be compatible with the traditional
packaging techniques a cap is placed on top of the sensing element to avoid blocking the moving parts
during the molding phase.
The equivalent circuit for the sensing element is shown in the below figure; when a linear acceleration is
applied, the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-
bridge. This imbalance is measured using charge integration in response to a voltage pulse applied to the
sense capacitor.
The nominal value of the capacitors, at steady state, is few pF and when an acceleration is applied the
maximum variation of the capacitive load is few tenth of pF.
LIS3L02AQ
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Figure 1. Equivalent electrical circuit
1.2 IC Interface

The complete signal processing uses a fully differential structure, while the final stage converts the differ-
ential signal into a single-ended one to be compatible with the external world.
The first stage is a low-noise capacitive amplifier that implements a Correlated Double Sampling (CDS) at
its output to cancel the offset and the 1/f noise. The produced signal is then sent to three different S&Hs,
one for each channel, and made available to the outside.
The low noise input amplifier operates at 200 kHz while the three S&Hs operate at a sampling frequency
of 66 kHz. This allows a large oversampling ratio, which leads to in-band noise reduction and to an accu-
rate output waveform.
All the analog parameters (output offset voltage and sensitivity) are ratiometric to the voltage supply. In-
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LIS3L02AQ

creasing or decreasing the voltage supply, the sensitivity and the offset will increase or decrease linearly.
The feature provides the cancellation of the error related to the voltage supply along an analog to digital
conversion chain.
1.3 Factory calibration

The IC interface is factory calibrated to provide to the final user a device ready to operate. The parameters
which are trimmed are: gain, offset, common mode and internal clock frequency.
The trimming values are stored inside the device by a poly-fuse structure. Any time the device is turned
on, the memorized bits are downloaded into the registers to be employed during the normal operation. The
poly-fuse approach allows the final user to utilize the device without any need for further calibration
LIS3L02AQ
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